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2017 ; 7
(ä): 43585
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Precision controlled atomic resolution scanning transmission electron microscopy
using spiral scan pathways
#MMPMID28272404
Sang X
; Lupini AR
; Ding J
; Kalinin SV
; Jesse S
; Unocic RR
Sci Rep
2017[Mar]; 7
(ä): 43585
PMID28272404
show ga
Atomic-resolution imaging in an aberration-corrected scanning transmission
electron microscope (STEM) can enable direct correlation between atomic structure
and materials functionality. The fast and precise control of the STEM probe is,
however, challenging because the true beam location deviates from the assigned
location depending on the properties of the deflectors. To reduce these
deviations, i.e. image distortions, we use spiral scanning paths, allowing
precise control of a sub-Å sized electron probe within an aberration-corrected
STEM. Although spiral scanning avoids the sudden changes in the beam location
(fly-back distortion) present in conventional raster scans, it is not
distortion-free. "Archimedean" spirals, with a constant angular frequency within
each scan, are used to determine the characteristic response at different
frequencies. We then show that such characteristic functions can be used to
correct image distortions present in more complicated constant linear velocity
spirals, where the frequency varies within each scan. Through the combined
application of constant linear velocity scanning and beam path corrections,
spiral scan images are shown to exhibit less scan distortion than conventional
raster scan images. The methodology presented here will be useful for in situ
STEM imaging at higher temporal resolution and for imaging beam sensitive
materials.