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.jpg): Failed to open stream: No such file or directory in C:\Inetpub\vhosts\kidney.de\httpdocs\pget.php on line 117 Nanoscale+Res+Lett
2017 ; 12
(1
): 138
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Plasma-Assisted Atomic Layer Deposition of High-Density Ni Nanoparticles for
Amorphous In-Ga-Zn-O Thin Film Transistor Memory
#MMPMID28235376
Qian SB
; Wang YP
; Shao Y
; Liu WJ
; Ding SJ
Nanoscale Res Lett
2017[Dec]; 12
(1
): 138
PMID28235376
show ga
For the first time, the growth of Ni nanoparticles (NPs) was explored by
plasma-assisted atomic layer deposition (ALD) technique using NiCp(2) and NH(3)
precursors. Influences of substrate temperature and deposition cycles on ALD Ni
NPs were studied by field emission scanning electron microscope and X-ray
photoelectron spectroscopy. By optimizing the process parameters, high-density
and uniform Ni NPs were achieved in the case of 280 °C substrate temperature and
50 deposition cycles, exhibiting a density of ~1.5?×?10(12) cm(-2) and a small
size of 3~4 nm. Further, the above Ni NPs were used as charge storage medium of
amorphous indium-gallium-zinc oxide (a-IGZO) thin film transistor (TFT) memory,
demonstrating a high storage capacity for electrons. In particular, the
nonvolatile memory exhibited an excellent programming characteristic, e.g., a
large threshold voltage shift of 8.03 V was obtained after being programmed at
17 V for 5 ms.