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2015 ; 5
(ä): 11952
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Maskless Lithography and in situ Visualization of Conductivity of Graphene using
Helium Ion Microscopy
#MMPMID26150202
Iberi V
; Vlassiouk I
; Zhang XG
; Matola B
; Linn A
; Joy DC
; Rondinone AJ
Sci Rep
2015[Jul]; 5
(ä): 11952
PMID26150202
show ga
The remarkable mechanical and electronic properties of graphene make it an ideal
candidate for next generation nanoelectronics. With the recent development of
commercial-level single-crystal graphene layers, the potential for manufacturing
household graphene-based devices has improved, but significant challenges still
remain with regards to patterning the graphene into devices. In the case of
graphene supported on a substrate, traditional nanofabrication techniques such as
e-beam lithography (EBL) are often used in fabricating graphene nanoribbons but
the multi-step processes they require can result in contamination of the graphene
with resists and solvents. In this letter, we report the utility of scanning
helium ion lithography for fabricating functional graphene nanoconductors that
are supported directly on a silicon dioxide layer, and we measure the minimum
feature size achievable due to limitations imposed by thermal fluctuations and
ion scattering during the milling process. Further we demonstrate that ion beams,
due to their positive charging nature, may be used to observe and test the
conductivity of graphene-based nanoelectronic devices in situ.