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10.1073/pnas.1501548112

http://scihub22266oqcxt.onion/10.1073/pnas.1501548112
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C4371916!4371916!25733848
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suck abstract from ncbi


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pmid25733848      Proc+Natl+Acad+Sci+U+S+A 2015 ; 112 (11): 3217-22
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  • Spray-combustion synthesis: Efficient solution route to high-performance oxide transistors #MMPMID25733848
  • Yu X; Smith J; Zhou N; Zeng L; Guo P; Xia Y; Alvarez A; Aghion S; Lin H; Yu J; Chang RPH; Bedzyk MJ; Ferragut R; Marks TJ; Facchetti A
  • Proc Natl Acad Sci U S A 2015[Mar]; 112 (11): 3217-22 PMID25733848show ga
  • Although impressive progress in solution-processed metal-oxide (MO) electronics has been achieved, fundamental science challenges remain concerning whether solution-processed MO materials and particularly technologically relevant, indium-gallium-tin-oxide (IGZO), can achieve efficient and stable charge transport characteristics when processed at low temperatures for short times and how IGZO film density, porosity, carrier mobility, and charge trapping can be manipulated. Here, we report a coating technique, spray-combustion synthesis, and demonstrate IGZO semiconductor thickness, densification, nanoporosity, electron mobility, trap densities, and bias stress stability approaching the quality of sputtered films.
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