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2008 ; 9
(1
): 014107
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Optics of high-performance electron microscopes
#MMPMID27877933
Rose HH
Sci Technol Adv Mater
2008[Jan]; 9
(1
): 014107
PMID27877933
show ga
During recent years, the theory of charged particle optics together with advances
in fabrication tolerances and experimental techniques has lead to very
significant advances in high-performance electron microscopes. Here, we will
describe which theoretical tools, inventions and designs have driven this
development. We cover the basic theory of higher-order electron optics and of
image formation in electron microscopes. This leads to a description of different
methods to correct aberrations by multipole fields and to a discussion of the
most advanced design that take advantage of these techniques. The theory of
electron mirrors is developed and it is shown how this can be used to correct
aberrations and to design energy filters. Finally, different types of energy
filters are described.