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2016 ; 11
(11
): e0166212
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Modular Scanning Confocal Microscope with Digital Image Processing
#MMPMID27829052
Ye X
; McCluskey MD
PLoS One
2016[]; 11
(11
): e0166212
PMID27829052
show ga
In conventional confocal microscopy, a physical pinhole is placed at the image
plane prior to the detector to limit the observation volume. In this work, we
present a modular design of a scanning confocal microscope which uses a CCD
camera to replace the physical pinhole for materials science applications.
Experimental scans were performed on a microscope resolution target, a
semiconductor chip carrier, and a piece of etched silicon wafer. The data
collected by the CCD were processed to yield images of the specimen. By selecting
effective pixels in the recorded CCD images, a virtual pinhole is created. By
analyzing the image moments of the imaging data, a lateral resolution enhancement
is achieved by using a 20 × / NA = 0.4 microscope objective at 532 nm laser
wavelength.