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2015 ; 6
(ä): 1712-20
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Imaging of carbon nanomembranes with helium ion microscopy
#MMPMID26425423
Beyer A
; Vieker H
; Klett R
; Meyer Zu Theenhausen H
; Angelova P
; Gölzhäuser A
Beilstein J Nanotechnol
2015[]; 6
(ä): 1712-20
PMID26425423
show ga
Carbon nanomembranes (CNMs) prepared from aromatic self-assembled monolayers
constitute a recently developed class of 2D materials. They are made by a
combination of self-assembly, radiation-induced cross-linking and the detachment
of the cross-linked SAM from its substrate. CNMs can be deposited on arbitrary
substrates, including holey and perforated ones, as well as on metallic
(transmission electron microscopy) grids. Therewith, freestanding membranes with
a thickness of 1 nm and macroscopic lateral dimensions can be prepared. Although
free-standing CNMs cannot be imaged by light microscopy, charged particle
techniques can visualize them. However, CNMs are electrically insulating, which
makes them sensitive to charging. We demonstrate that the helium ion microscope
(HIM) is a good candidate for imaging freestanding CNMs due to its efficient
charge compensation tool. Scanning with a beam of helium ions while recording the
emitted secondary electrons generates the HIM images. The advantages of HIM are
high resolution, high surface sensitivity and large depth of field. The effects
of sample charging, imaging of multilayer CNMs as well as imaging artefacts are
discussed.