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2014 ; 7
(3
): 2301-2339
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Germanium Based Field-Effect Transistors: Challenges and Opportunities
#MMPMID28788569
Goley PS
; Hudait MK
Materials (Basel)
2014[Mar]; 7
(3
): 2301-2339
PMID28788569
show ga
The performance of strained silicon (Si) as the channel material for today's
metal-oxide-semiconductor field-effect transistors may be reaching a plateau. New
channel materials with high carrier mobility are being investigated as
alternatives and have the potential to unlock an era of ultra-low-power and
high-speed microelectronic devices. Chief among these new materials is germanium
(Ge). This work reviews the two major remaining challenges that Ge based devices
must overcome if they are to replace Si as the channel material, namely,
heterogeneous integration of Ge on Si substrates, and developing a suitable gate
stack. Next, Ge is compared to compound III-V materials in terms of p-channel
device performance to review how it became the first choice for PMOS devices.
Different Ge device architectures, including surface channel and quantum well
configurations, are reviewed. Finally, state-of-the-art Ge device results and
future prospects are also discussed.