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2015 ; 5
(ä): 10968
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All-nanophotonic NEMS biosensor on a chip
#MMPMID26043287
Fedyanin DY
; Stebunov YV
Sci Rep
2015[Jun]; 5
(ä): 10968
PMID26043287
show ga
Integrated chemical and biological sensors give advantages in cost, size and
weight reduction and open new prospects for parallel monitoring and analysis.
Biosensors based on nanoelectromechanical systems (NEMS) are the most attractive
candidates for the integrated platform. However, actuation and transduction
techniques (e.g. electrostatic, magnetomotive, thermal or piezoelectric) limit
their operation to laboratory conditions. All-optical approach gives the
possibility to overcome this problem, nevertheless, the existing schemes are
either fundamentally macroscopic or excessively complicated and expensive in mass
production. Here we propose a novel scheme of extremely compact NEMS biosensor
monolithically integrated on a chip with all-nanophotonic transduction and
actuation. It consists of the nanophotonic waveguide and the nanobeam cantilever
placed above the waveguide, both fabricated in the same CMOS-compatible process.
Being in the near field of the strongly confined photonic or plasmonic mode,
cantilever is efficiently actuated and its response is directly read out using
the same waveguide, which results in a very high sensitivity and capability of
single-molecule detection even in atmosphere.